椭球形光学元件镀膜均匀性研究

发布时间：2018-06-01 20:35

本文选题：椭球形光学元件 + 真空镀膜　；参考：《长春理工大学》2017年硕士论文

【摘要】：膜厚均匀性是考核膜层性能的重要指标之一,对于一般较小且形状较为平整的光学元件,其膜厚的均匀性一般会得到良好的控制。而对于大曲率的球形基底表面,尤其是内表面,由于入射粒子的角度变化相当大,从正入射变成近乎零度掠入射,导致沉积粒子获得的能量变化极大,从而带来十分严重的膜厚均匀性问题。本论文所探究的是特定口径和深度比4:1的椭球形光学元件内表面镀膜的均匀性。通过对影响椭球镜的膜厚分布各种因素的调整,来调整和改善其膜厚均匀性。针对椭球形光学元件的膜层均匀性进行了理论分析研究。通过对基底内表面的数学模型建立,运用膜厚理论公式表达出内表面的膜厚分布。分析了夹具的自转、真空室气压和离子源辅助蒸镀对膜厚的影响,并在实验中得到了较为理想的膜厚分布,在400mm的口径上制备的SIO2膜层均匀性达到0~5%。该研究工作对这种大口径膜层镀制工艺具有一定的指导意义,在改善此种表面膜层均匀性上提供了理论依据。
[Abstract]:The uniformity of film thickness is one of the important indexes to evaluate the performance of the film, and the uniformity of the film thickness can be controlled well for the optical elements which are generally small and flat in shape. However, for the spherical substrate surface with large curvature, especially the inner surface, the energy obtained by the deposited particles varies greatly because the angle of the incident particles varies greatly, from normal incidence to near-zero grazing incidence. Thus, the problem of film thickness uniformity is very serious. In this paper, the uniformity of coating on the inner surface of ellipsoidal optical elements with specific aperture and depth ratio of 4:1 is investigated. The uniformity of film thickness is adjusted and improved by adjusting various factors affecting the film thickness distribution of ellipsoidal mirror. The film uniformity of ellipsoidal optical elements is studied theoretically. By establishing the mathematical model of the inner surface of the substrate, the thickness distribution of the inner surface is expressed by using the theoretical formula of film thickness. The effects of the rotation of the clamp, vacuum chamber pressure and ion source assisted evaporation on the film thickness were analyzed, and the ideal film thickness distribution was obtained in the experiment. The uniformity of the SIO2 film prepared on the 400mm caliber was 0 ~ 5%. The research work has certain guiding significance for this kind of large diameter film coating plating process and provides the theoretical basis for improving the uniformity of the surface film coating.
【学位授予单位】：长春理工大学
【学位级别】：硕士
【学位授予年份】：2017
【分类号】：O484

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