脉冲激光沉积低内应力多层类金刚石膜

发布时间：2018-01-08 23:00

本文关键词：脉冲激光沉积低内应力多层类金刚石膜　出处：《红外与激光工程》2017年09期 　论文类型：期刊论文

【摘要】：为解决类金刚石膜内应力极大的问题,利用很薄的岛状结构锗层与较厚的类金刚石层循环,设计并制备了具有低内应力的多层类金刚石膜。其中,类金刚石层为主要功能膜层,起到硬质保护和光学增透的作用;而锗层作为缓冲层,起到缓解纯类金刚石膜内应力过大的问题,同时由于锗层很薄,对整个膜层的机械性能和红外特性的影响很小。测试表明,制备的多层类金刚石膜内应力为2.14 GPa,比纯类金刚石膜降低了39%,通过了GJB2485-95《光学膜层通用规范》中的重摩擦测试;同时,其纳米硬度仍保持在47 GPa的高水平。该多层类金刚石膜可以作为实际应用的红外窗口保护膜。
[Abstract]:In order to solve the problem of high stress in diamond-like carbon (DLC) films, a multilayer diamond-like carbon film with low internal stress was designed and prepared by circulating the thin island structure germanium layer and the thicker diamond-like carbon layer. Diamond-like carbon (DLC) is the main functional film, which plays the role of hard protection and optical antireflection. As a buffer layer, germanium layer can alleviate the problem of excessive stress in pure diamond-like carbon film. At the same time, because germanium layer is very thin, it has little effect on the mechanical properties and infrared properties of the whole film. The internal stress of the multilayer diamond-like carbon film is 2.14 GPA, which is 39% lower than that of pure diamond-like carbon film. The heavy friction test in GJB2485-95 Optical Film General Specification has been carried out. At the same time, the nano-hardness of the film remains at a high level of 47 GPa. The multilayer diamond-like carbon film can be used as a practical infrared window protection film.
【作者单位】：武汉军械士官学校光电技术研究所;
【基金】：国家部委预先研究项目(51318060212)
【分类号】：TB383.2;TQ163
【正文快照】： 0引言类金刚石(Diamond-Like Carbon,DLC)膜具有许多独一无二的特性,如高硬度、宽光谱透过和化学稳定等[1-3]。与其他沉积方法相比,脉冲激光沉积(Pulsed Laser Deposition,PLD)技术制备的无氢DLC膜具有更高的硬度和化学稳定性。但是,其内应力也很高,一般3~8 GPa[4-10];因此,其

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