低相干光干涉高精度透镜中心厚度的测量方法
发布时间：2018-08-09 14:11
【摘要】：阐述了一种基于低相干光干涉技术的透镜中心厚度的测量方法,并设计了腔式测量结构对未知折射率的材料进行中心厚度测量。测量系统为包括低相干测量和激光测距的全光纤结构。低相干测量结构参考臂和激光测距结构参考臂的共光路设计降低了环境因素的影响,提高了测量稳定性,并利用七步相移法实现对干涉信号的定位和提取。另外,利用低相干测量方法中的平衡差分结构去除了干涉信号中的直流项,同时提高了弱信号的定位精度。实验结果表明,该腔式测量结构对殷瓦合金标准块的测量精度优于0.5μm,该系统能够实现对透镜中心厚度的高精度测量,满足高精密光学系统的测量要求。
[Abstract]:In this paper, a method of measuring the thickness of lens center based on low coherent light interferometry is presented, and a cavity structure is designed to measure the central thickness of materials with unknown refractive index. The measuring system is an all-fiber structure including low coherence measurement and laser ranging. The design of the common optical path of the reference arm of low coherence measurement structure and the reference arm of laser ranging structure reduces the influence of environmental factors and improves the stability of measurement. The seven-step phase shift method is used to locate and extract the interference signal. In addition, the DC term in the interference signal is removed by using the balanced differential structure in the low coherence measurement method, and the positioning accuracy of the weak signal is improved at the same time. The experimental results show that the measurement accuracy of the cavity structure is better than 0.5 渭 m for the standard block of Yin tile alloy. The system can realize the high precision measurement of the thickness of the lens center and meet the requirements of the high precision optical system.
【作者单位】： 中国科学院上海光学精密机械研究所信息光学与光电技术实验室;中国科学院大学;
【基金】：国家科技重大专项(2011ZX02402)
【分类号】：O436.1
本文编号：2174326
[Abstract]:In this paper, a method of measuring the thickness of lens center based on low coherent light interferometry is presented, and a cavity structure is designed to measure the central thickness of materials with unknown refractive index. The measuring system is an all-fiber structure including low coherence measurement and laser ranging. The design of the common optical path of the reference arm of low coherence measurement structure and the reference arm of laser ranging structure reduces the influence of environmental factors and improves the stability of measurement. The seven-step phase shift method is used to locate and extract the interference signal. In addition, the DC term in the interference signal is removed by using the balanced differential structure in the low coherence measurement method, and the positioning accuracy of the weak signal is improved at the same time. The experimental results show that the measurement accuracy of the cavity structure is better than 0.5 渭 m for the standard block of Yin tile alloy. The system can realize the high precision measurement of the thickness of the lens center and meet the requirements of the high precision optical system.
【作者单位】： 中国科学院上海光学精密机械研究所信息光学与光电技术实验室;中国科学院大学;
【基金】：国家科技重大专项(2011ZX02402)
【分类号】：O436.1
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