低发散角GaSb基宽区波导激光器的研究

发布时间：2018-04-03 19:05

本文选题：半导体激光器　切入点：GaSb　出处：《中国科学院研究生院(长春光学精密机械与物理研究所)》2016年博士论文

【摘要】：本论文主要研究了低发散角2μm波段GaSb基宽区波导半导体激光器的设计与实现。研究从宽区激光器侧向和横向发散角的改善着手,在侧向即激光器的慢轴方向,我们通过引入鱼骨形微结构增加高阶膜的损耗,抑制高阶模式激射,改善激光器的侧向光束质量;在横向即激光器的快轴方向,我们采用布拉格反射波导结构,利用光子带隙原理取代传统的全反射波导进行光场限制,用来实现大的光学模式尺寸、高功率、低发散角激光输出。该方法可以有效解决传统半导体激光器发散角大、易于腔面灾变损伤、光束质量差、亮度低等问题,因此本研究选题具有一定的创新性和重要的研究意义。本论文主要针对高光束质量2μm波段GaSb基半导体激光器,重点研究其结构设计、材料生长、器件制备及测试分析,具体的研究内容和成果如下:(1)采用传输矩阵理论和布洛赫波近似的方法设计了新型高折射率中心层低快轴发散角GaSb基布拉格反射波导激光器。(2)理论研究了布拉格反射镜(DBR)的厚度、对数、高低折射率比以及中心腔厚度对激光器的远场发散角和光限制因子的影响,最终获得优化的器件结构,该结构可将2μm GaSb基激光器快轴发散角(半高全宽)从50度以上压缩到10度以下。(3)采用有限元插分法(FDTD)模拟鱼骨形微结构对各高阶侧向模式的调制作用,理论上证明该结构可有效抑制高阶模式激射,改善激光器侧向光束质量。(4)将鱼骨形微结构应用于GaAs基宽区布拉格反射波导激光器上,制备了100μm条宽、1.4mm腔长的单元器件,测试结果表明远场发散角降低22.2%,从而在实验上验证鱼骨形微结构的对侧向发散角的改善作用。(5)将鱼骨形微结构应用于2μm波段GaSb基宽区半导体激光器,侧向远场发散角改善了56.4%,连续输出功率提高19%,而且该结构基本不改变宽区GaSb基激光器的制备流程,具有工艺简单、成本低、可规模化制备等优点,为低侧向发散角GaSb基激光器的实现提供了一种有效的解决方法。
[Abstract]:This paper mainly studies the low divergence angle design of 2 m wavelength GaSb based wide area waveguide semiconductor lasers and implementation. The lateral and transverse divergence angle of laser zone from the research to the side in the slow axis direction of laser, we introduce a fishbone shaped micro structure increase the loss of high order film, suppression of high order mode lasing, the lateral beam quality of laser in fast axis direction; the lateral laser, we use the Prague reflection waveguide structure with photonic bandgap principle of light field to replace the traditional limit of total reflection waveguide, used to achieve the size, large optical mode of high power, low divergence angle of the laser output. The method can effectively solve the traditional the semiconductor laser divergence angle, easy cavity surface catastrophic damage, poor beam quality, low brightness, so this study has some innovative and important research significance of this theory. Aiming at the high beam quality 2 M band GaSb based semiconductor laser, research on the structure design, focusing on the growth of materials, preparation and analysis of test device system, the specific research contents and results are as follows: (1) a new type of high refractive index and low center layer fast axis divergence angle of GaSb based Prague reflection waveguide laser design using transmission the matrix theory and Bloch wave approximation method. (2) studied Prague reflector (DBR) thickness, logarithmic, high and low refractive index ratio and cavity thickness of far field divergence angle of laser and optical limiting factors, finally get the optimized device structure, the structure can be 2 m based on GaSb laser fast axis divergence angle (FWHM) from 50 degrees to 10 degrees below the compression. (3) using finite element difference method (FDTD) modulation effect on the microstructure of the simulated fishbone high order lateral mode, the theoretical results indicate that the structure can effectively suppress the high Order mode lasing, improved lateral beam quality of lasers. (4) the fishbone micro structure is applied to the GaAs based wide area Prague reflection waveguide laser, prepared 100 m wide, 1.4mm long cavity unit device. The test results show that the far-field divergence angle is reduced by 22.2%, in order to verify the effect of fishbone shaped micro structure the lateral divergence angle in the experiment. (5) the fishbone micro structure is applied to the 2 M band GaSb based wide area semiconductor laser, lateral far-field divergence angle of 56.4% improvement, continuous output power is increased by 19%, but the basic structure does not change the width of GaSb based laser preparation process with process simple, low cost, large-scale preparation etc., provides an effective solution to achieve the low lateral divergence angle of GaSb based laser.

【学位授予单位】：中国科学院研究生院(长春光学精密机械与物理研究所)
【学位级别】：博士
【学位授予年份】：2016
【分类号】：TN248.4

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