熔渗法制备钼铜复合材料

发布时间：2018-05-06 05:28

  本文选题：Mo-Cu复合材料 + 喷雾干燥-煅烧-氢气还原法　； 参考：《中南大学》2011年硕士论文

【摘要】：Mo-Cu复合材料作为微电子封装材料及集成电路的热沉材料,要求具有高致密度、高结构均匀性、高的热导电导性和低膨胀系数。研究高致密度、高热导电导和低铜含量Mo-Cu复合材料,作为电子封装材料及热沉材料具有非常积极的意义。 本研究以MoO3悬浮液为原料,采用喷雾干燥-煅烧-氢气还原工艺制备良好压制性能的钼粉,然后采用压制-低温预烧骨架-熔渗法制备高致密度、低铜含量钼铜复合材料。探讨了MoO3悬浮料浆体积固相含量、氨水添加量、PEG含量的选择,喷雾干燥、煅烧和氢气还原工艺的选择；此外对钼粉压制特性、骨架预烧工艺、熔渗工艺进行了研究,并对熔渗法制备Mo-Cu复合材料的力学性能及热物性能进行了测试分析。主要结论如下： 1)配制体积固含量15%、PEG 2wt%分散剂、pH值为4.5的Mo03悬浮料浆,喷雾干燥-煅烧-氢气还原,制备了低杂质含量,颗粒密实的球形钼粉。 2)制备钼粉比传统钼粉具有更优越的压缩特性,压坯密度随压力变化满足黄培云压制方程。压力P小于等于1000MPa和P大于等于1000MPa时,传统钼粉压制模量M分别为0.073和0.79,硬化指数分别为4.17和2.15。制备钼粉压制模量M分别为0.066和0.15,硬化指数分别为4.05和3.41。 3)熔渗温度为1300℃时,熔渗时间1h,合金致密度最高。Mo65、Mo70最佳熔渗温度为1200℃, Mo75、Mo80、Mo85最佳熔渗温度为1250℃。 4)制备的Mo70Cu、Mo75Cu、Mo80Cu、Mo85Cu合金热导率和热膨胀系数分别为190、181、166、153 W.m-1.K-1和8.4×10-4、7.7×10-4、7.1×10-4、6.4×10-4℃-1-,合金热导率随钼体积分数成线性负相关,实验结果与利氏公式预测值较为一致,整体上实验测定值比理论预测值低。 5) Mo65Cu、Mo70Cu,钼铜两相组织分别比较均匀,但有少量富铜存在。Mo75Cu、Mo80Cu、Mo85Cu,其钼、铜相显微组织结构均匀,无富铜相存在,钼颗粒均比较细小,无明显长大趋势。采用熔渗法制备低铜含量钼铜合金,能够保证合金高致密度和组织结构的均匀性,从而提高声子的传导效率,保证合金高热导性及气密性。
[Abstract]:As microelectronic packaging materials and heat sink materials of integrated circuits, Mo-Cu composites require high density, high structural uniformity, high thermal conductivity and low expansion coefficient. It is of great significance to study Mo-Cu composites with high density, high thermal conductivity and low copper content as electronic packaging materials and heat sink materials. In this study, molybdenum powder with good compaction performance was prepared by spray drying, calcination and hydrogen reduction process with MoO3 suspension as raw material, and then high density, low copper content molybdenum copper composite was prepared by pressure-low temperature pre-sintering skeleton infiltration method. The selection of volume solid content of MoO3 suspension slurry, the content of ammonia water, the selection of spray drying, calcination and hydrogen reduction process were discussed, and the characteristics of molybdenum powder pressing, skeleton pre-firing process and infiltration process were also studied. The mechanical properties and thermal properties of Mo-Cu composites prepared by infiltration method were tested and analyzed. The main conclusions are as follows: 1) spherical molybdenum powder with low impurity content and dense particles was prepared by spray drying, calcination and hydrogen reduction of Mo03 suspension slurry with pH 4.5 of PEG2wt% dispersant. 2) the prepared molybdenum powder has more superior compression properties than the traditional molybdenum powder, and the compaction density changes with the pressure to satisfy Huang Peiyun's pressing equation. When the pressure P is less than or equal to 1000MPa and P > equal to 1000MPa, the compression modulus M of traditional molybdenum powder is 0.073 and 0.79, and the hardening index is 4.17 and 2.15 respectively. The compaction modulus M of molybdenum powder is 0.066 and 0.15, and the hardening index is 4.05 and 3.41 respectively. 3) when the infiltration temperature is 1300 鈩，

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