sol-gel法制备NiZn铁氧体透明薄膜研究

发布时间：2018-05-12 01:14

  本文选题：NiZn铁氧体薄膜 + 溶胶-凝胶法　； 参考：《应用化工》2016年08期

【摘要】：采用溶胶-凝胶法制备NiZn铁氧体薄膜,研究了溶胶配制、甩胶及退火工艺对NiZn铁氧体薄膜性能的影响,系统研究了制备工艺和退火工艺。结果表明,不同的膜厚,改变了样品内的残余应力;在退火工艺上,升温速率直接影响成核数量,退火温度和保温时间决定薄膜的结晶程度和附着力的大小。通过对溶胶-凝胶法制备NiZn铁氧体薄膜技术的研究及工艺优化,得到合理的退火处理工艺为:以2.5℃/min的升温速率升到700℃,保温40 min后随炉自然冷却到室温。同时研究了NiZn铁氧体薄膜的可见光透过和微波损耗特性。
[Abstract]:NiZn ferrite thin films were prepared by sol-gel method. The effects of sol preparation, gel throwing and annealing on the properties of NiZn ferrite films were studied. The results show that the residual stress in the sample is changed with different film thickness, and the nucleation quantity is directly affected by the heating rate, and the crystallization degree and adhesion of the film are determined by annealing temperature and holding time. NiZn ferrite thin films prepared by sol-gel method were studied and optimized. The reasonable annealing process was obtained as follows: the heating rate was raised to 700 鈩，

本文编号：1876459